Joint development agreement announced to advance SCALPEL lithography

A group of semiconductor device and equipment manufacturers today announced a joint agreement aimed at accelerating the development of SCALPEL technology into a production lithography solution for building future generations of integrated circuits. Participants in the program include eLithTM LLC, a joint venture of Applied Materials Inc. and ASM Lithography Holding NV; Lucent Technologies Inc.; Motorola Semiconductor Products Sector; Samsung Electronics Co. Ltd.; and Texas Instruments Incorporated (TI). The program will remain open to additional companies interested in furthering this technology.

手术刀投影电子光刻是作为当前光刻方法的潜在继任者，用于对较小，更强大的芯片进行图案。与当今的前沿180纳米（0.18微米）技术相比，使用电子源代替了光源，投影电子技术具有打印具有小于50纳米（0.05微米）的功能的图像。万博manbetx官网登录

"Motorola is pleased to be part of this group of leading-edge companies which will assure that SCALPEL technology is vigorously pursued," said Joe Mogab, manager of Advanced Process Development for Motorola's DigitalDNA Laboratories. "We feel that SCALPEL can become a strong technology for next generation wafer processing which will help us maintain our leadership in embedded processors."

三星半导体研发中心高级副总裁Moon Yong Lee博士说：“我们很高兴成为探索这一令人兴奋的新印刷领域的努力的一部分。”“投影电子光刻已经显示出具有重大选择的重要潜力，可以创建高级DRAM（动态随机访问记忆）所需的电路，因为我们移至0.1微米的几何形状及以后。”万博manbetx官网登录

Dr. Bob Helms, vice president and director of Silicon Technology Research of Texas Instruments said, "TI is pleased to facilitate the commercialization of electron projection lithography through participation in this program. We believe this advanced lithography approach has the greatest potential for our DSP and ASIC market segments in terms of high wafer volume and low cost of ownership. The continuation of this development effort can potentially reduce semiconductor manufacturers costs and continue technology development at the 100 nm (0.1 micron) node and beyond."

"The industry leaders who have joined this program validate our belief that SCALPEL technology, developed at Lucent's Bell Labs, is the most promising route to ICs with 0.1 micron and smaller feature sizes," said Mark Pinto, chief technical officer of Lucent Technologies Microelectronics Group. "This agreement will help accelerate the realization of commercially viable systems that will allow us to deliver future generations of communications networks and handheld devices."

为了促进该计划的工作，设备制造商应用材料和ASM光刻构成了合资企业Elith LLC。“该事业的最终目标是将电子投影技术作为一种值得制作的制造工具进行商业化，以实现芯片技术的迁移和摩尔法律的延续，” Applied Materials高万博manbetx官网登录级副总裁Sass Somekh博士说。“我们很高兴能参与该行业的几家支持这项工作的顶级半导体制造商。”

ASML营销与技术执行副总裁Martin van den Brink补充说：“该计划为我们提供了一个与最终用户直接合作的绝佳机会，以开万博manbetx官网登录发一种可能集成到未来制造业线的解决方案。我们参与其中合作工作是我们先进的光刻路线图活动的一部分，为我们提供了一个机会，可以为高级成像系统提供专业知识，以进一步发展电子投影光刻。”