基础of photolithography, the critical step in the chipmaking process
Microchips are made by building up complex patterns of transistors, layer by layer, on a silicon wafer. ASML’s lithography systems are central to that process.
A lithography (more formally known as ‘photolithography’) system is essentially a projection system. Light is projected through a blueprint of the pattern that will be printed (known as a ‘mask’ or ‘reticle’).
The science behind the chip
The Rayleigh criterion
Learn the equation that determines just how small the transistors on a microchip can be.
From visible blue light to invisible extreme UV light, our lithography machines keep innovation in light and lasers moving forward.
Lenses & mirrors
The complex optical systems in our lithography machines reduce the image to be printed on a wafer to the nanometer level.