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Lithography principles

基础of photolithography, the critical step in the chipmaking process

Microchips are made by building up complex patterns of transistors, layer by layer, on a silicon wafer. ASML’s lithography systems are central to that process.

A lithography (more formally known as ‘photolithography’) system is essentially a projection system. Light is projected through a blueprint of the pattern that will be printed (known as a ‘mask’ or ‘reticle’).

利用在光中编码的图案,系统的光学器件收缩并将图案缩小到光敏硅晶片上。在打印图案之后,系统稍微移动晶片并在晶片上进行另一个副本。

The science behind the chip